IC6 Thin Film Deposition Controller
IC6 Thin Film Deposition Controller
제품 특징
- The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your deposition process. The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of 0.00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 1 |
| product spec | Measurement Performance
Frequency resolution : ±0.0035 Hz @ 6 MHz Thickness and rate resolution/measurement (1) : ±0.00433 Å Measurement frequency range : 6.0 to 4.5 MHz (fixed) Thickness accuracy (2) : 0.5% Measurement interval : 0.10 s Multiple measurement averaging : 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 sec. averaging allowed Design Features Auto Z : yes Autotone : yes Co-deposition : yes (up to 6 sources) Process Recipe & Data Management Material programs : 32 Process layers (per process) : 200 Processes : 50 (processes can be linked together) USB memory : yes Data logging : yes Hardware Features Sensors (3) Single : 8 Dual / CrystalTwo® : 4 / 8 (with CrystalTwo® Switch) CrystalSix® : 8 Crystal 12® : 8 Generic : 8 Source Controls Number of sources (4) : up to 6 Source control voltages : 0 to +/-10 V, adjustable Output resolution : 15 bits over full range (0 to 10V) Crucible positions : 64 Inputs / Outputs Inputs : 14 standard, up to 28 optional; TTL/CMOS logic compatible or closure to ground Outputs : 8 standard, up to 24 optional programmable SPST relays rated at 30 V(dc) or 30 V(ac) RMS or 42 V peak @ 2.5 amps; 14 optional TTL outputs Recorder output (4) : 0 to +10 V, adjustable Logic statements : 100 fully programmable; up to 5 actions, 5 events per statement Communications Standard : RS232 Optional : Ethernet Display Thickness resolution : 1 Å for 0 to 9.999 kÅ 10 Å for 10.00 to 99.99 kÅ 100 Å for 100.0 to 999.9 kÅ 1 kÅ for 1000 to 9999 kÅ Rate resolution : 0.001 for 0 to 9.999 Å/s if rate filter time setting is 10 seconds or greater 0.01 for 0 to 99.99 Å/s 0.1 for 100 to 999.9 Å/s Operation Power requirements : 100 – 230 V (ac) +/- 15% 50 / 60 Hz +/- 3 Hz Operating temperature : 0 to 50 C (32 to 122 F) Dimensions, excluding mounts (h x w x d) : 5.25” x 19” x 13” (133mm x 483mm x 330 mm) Weight : 23 lbs (10.5 kg) (1) Tooling/density = 100/1, fundamental frequency = 6 MHz (2) Varies according to process; figures reflect typical accuracy (3) Maximum configuration of each type (4) The IC6 has 6 DAC outputs standard, 6 more can be added as an option. Any of the 12 can be configured as source control voltages or recorder outputs however the number of sources that can be controlled simultaneously is 6 |
| quantity | 0 |
| reg date | 2017-01-18 17:22:32 |
| single | No |