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박막 증착 컨트롤러, 모니터 및 QCM 측정 기기는 빠른 측정 속도와 정밀도로 가장 복잡한 프로세스의 증착 비율 및 두께를 제어합니다.
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CI-100 Crucible Indexer
CI-100 Crucible Indexer
The CI-100 Crucible, or Turret, Indexer is used to rotate multi-pocket electron beam gun sources through a rotary vacuum feedthrough. It consists of a controller, motor drive, mounting bracket, and interconnecting cable. The configuration is flexible to adapt to your specific system and process. Setup and operation are simple and intuitive. The CI-100 is compatible with virtually all electron beam gun sources, and the digital I/O is compatible with existing turret indexers.
EBS-530 Electron Beam Sweep Controller
EBS-530 Electron Beam Sweep Controller
EBS-530 Electron Beam Sweep Controller generates a large number of precision sweep patterns for use with electron beam (e-beam) deposition sources. The user may select from the basic shapes provided(circle, figure-8, line and point), or create user-defined patterns to optimize deposition control of metals and dielectric materials. Variations on the basic shapes can be created by applying the provided pattern modifiers. Pattern modifiers provided include power, sweep frequency, rotational speed and power profile.Operation and programming is easy through the user-friendly touch screen LCD display. EBS-530 can store up to 32 different sweep patterns. Sweep patterns can easily be selected from the front panel, through remote input, or through the standard RS-232/RS-485 interface.Starting with a fixed set of basic sweep patterns that are embedded in the Sweep Control, the user can design e-beam sweep patterns that are ideally suited to the characteristics of the source and deposition materials. The sweep patterns generated by EBS-530 produce dual current outputs which can drive the X and Y sweep coils of most electron beam deposition sources.EBS-530 features a calibration function to compensate for differences between types and brands of e-beam guns and provides optimum heating of the deposition material.
HVPS/SC High Voltage Power Supply with Integrated Source Control
HVPS/SC High Voltage Power Supply with Integrated Source Control
HVPS/SC is a solid state high voltage power supply with an integrated source controller used in electron beam (e-beam) vacuum deposition systems. Its revolutionary design makes it one of the smallest, most efficient, and feature packed high voltage power supplies on the market.POWERFUL PERFORMANCEHVPS/SC has adjustable output voltage from 4 to 10.2 kV and adjustable emission current from 10 to 999 mA. This makes it compatible with a variety of electron beam guns. Zero voltage switching (ZVS) technology and near unity power factor help make the HVPS/SC over 90% efficient with less than 1% emission current ripple for a precise and reliable electron beam.BUILT TO LASTHVPS/SC is rugged and reliable. Designed for continuous duty and/or continuous arcing, full arc recovery can be achieved in just 15 ms. A low stored energy of less than 2 Joules of energy at 10 kW helps quickly dissipate arcs with minimal effect on rate control. Each HVPS/SC is fully tested and burned in to ensure proper operation and durability.
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