Quartz Crystal Sensors and Feedthroughs
총 11개 제품
상위 분류: Inficon
ALD Sensor
ALD Sensor
INFICON ALD Sensors bring the repeatability, precision, and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD). The ALD Sensor can withstand temperatures up to 450ºC, and is designed to operate in the harsh environment of an ALD application. The exposed crystal electrode is fully grounded to effectively eliminate any potential issues with electrical interference.Designed Specifically for ALDA unique feature of the INFICON ALD Sensor is a gas tube used to purge the back of the crystal and sensor cavity with an inert gas, typically nitrogen. This keeps reactive chamber gases from entering the sensor head and keeps the back of the crystal and electrical contacts free of deposition material. This technique allows for in situ measurement in systems where a standard QCM is not suitable.Feedthrough and Feedthrough ConnectionINFICON ALD Sensors are available in custom welded lengths or with compression fittings for adjustable length without the need for brazing or welding. All configurations use a 2 ¾ in. (CF40) ConFlat® flange feedthrough.
Components
Components
Our line of Thin Film Coating Instruments includes Thickness Monitors and Controllers, Cables and Quartz Crystals, and related accessories. Please contact our sales department with your specific coating instrument accessories requirements.
Cool Drawer Dual Sensor
Cool Drawer Dual Sensor
The Cool Drawer Dual Sensor is designed for use in critical processes where it is desirable to have a second crystal in the vacuum chamber. Water cooled, cast stainless steel sensor body, two Cool Drawer crystal holders and a pneumatically actuated shutter provide for a rugged sensor head with the extra reliability of a backup crystal. A cleaner, more reliable vacuum system installation is possible as there are no coaxial cables inside the chamber.
Cool Drawer Single Sensor
Cool Drawer Single Sensor
The Cool Drawer Single Sensors allow crystal installation into the sensor from the side, convenient for systems with insufficient room for front load crystal installation. The Cool Drawer Single Sensor employs the Cool Drawer Crystal Holder which is thermally shielded by the water-cooled housing insuring excellent crystal performance.
Crystal 12® Sensor
Crystal 12® Sensor
The INFICON Crystal 12 Sensor replaces its crystals automatically without interrupting your process, when partnered with the INFICON IC6 Thin Film Deposition Controller. Whenever a crystal becomes unstable or fails, IC6 signals the Crystal 12 sensor carousel to immediately rotate a new crystal into position, for continuous deposition rate monitoring. To further minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open.
CrystalSix® Sensor
CrystalSix® Sensor
The INFICON CrystalSix Sensor is critical for long processes demanding continuous rate control. Whether an OLED, MBE, solar, long optical coating, or other processes having an extended period between chamber venting, the CrystalSix sensor offers the security of 6 quartz monitor crystals in one sensor head. When used with an INFICON Thin Film Controller, the CrystalSix automatically rotates a new crystal into position whenever the current crystal fails or becomes unstable. Crystals are automatically replaced without interrupting your process for continued deposition rate monitoring.Crystal indexing is accomplished with a pneumatically driven mechanism. This pneumatically driven motor provides better crystal thermal stability than competitive units using expensive in-vacuum, heat generating, electric motors. One-eighth inch water cooling tubes keep the sensor head thermally stable and allow flexibility in sensor placement.When used with certain INFICON thin film controllers, the sensor provides position feedback so specific positions can be used with specific materials.
Front Load Dual Sensor
Front Load Dual Sensor
INFICON Front Load Dual crystal sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. The dual sensor provides a backup crystal and is essential for critical processes where it is desirable to have the second crystal in the vacuum chamber.The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion. Assembled mechanically rather than soldered, parts can be replaced conveniently in the field, if necessary. Sensors can be ordered individually or in a sensor/feedthrough combination that can be either welded or assembled with compression fittings.
Front Load Single Sensor
Front Load Single Sensor
INFICON Front Load Single crystal sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion. Assembled mechanically rather than soldered, parts can be replaced conveniently in the field, if necessary. Sensors can be ordered individually or in a sensor / feedthrough combination that can be either welded or assembled with compression fittings.
RSH-600 Rotary Sensor
RSH-600 Rotary Sensor
RSH-600 Rotary Sensor Heads are designed for demanding processes, employing very thick films and several different materials. The RSH-600 holds six crystals in a thermally shielded, water-cooled housing, ensuring excellent crystal performance in temperature environments up to 300°C. Crystals are housed in an easy to remove Teflon® and stainless steel crystal holder.
Sputtering Sensor
Sputtering Sensor
The INFICON Sputtering Sensor is specifically designed for use in any sputtering process. The sensor body and cooling tubes are gold plated beryllium copper for maximum cooling efficiency in the sputtering environment. A magnet built into the sensor head reduces excessive heating by energetic free electrons in sputtering systems by deflecting them with the external magnetic field. The rear loading crystal holder design allows easy crystal replacement without having to remove the sensor head from the system.
UHV Bakeable Sensor
UHV Bakeable Sensor
INFICON UHV Bakeable Crystal Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. Made from 304 Stainless Steel, Molybdenum, Inconel, Nickel, and Alumina materials, the UHV Bakeable Sensor is designed to withstand continuous bakeout temperatures up to 450° C (for bakeout only, water flow required for actual deposition monitoring). The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion.
제품 상담 및 견적이 필요하신가요?
넥스트론의 전문 상담원이 상세 스펙과 가격 정보를 신속하게 안내해드립니다.