ALD Sensor
ALD Sensor
제품 특징
- INFICON ALD Sensors bring the repeatability, precision, and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD). The ALD Sensor can withstand temperatures up to 450ºC, and is designed to operate in the harsh environment of an ALD application. The exposed crystal electrode is fully grounded to effectively eliminate any potential issues with electrical interference.
- Designed Specifically for ALD
- A unique feature of the INFICON ALD Sensor is a gas tube used to purge the back of the crystal and sensor cavity with an inert gas, typically nitrogen. This keeps reactive chamber gases from entering the sensor head and keeps the back of the crystal and electrical contacts free of deposition material. This technique allows for in situ measurement in systems where a standard QCM is not suitable.
- Feedthrough and Feedthrough Connection
- INFICON ALD Sensors are available in custom welded lengths or with compression fittings for adjustable length without the need for brazing or welding. All configurations use a 2 ¾ in. (CF40) ConFlat® flange feedthrough.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 7 |
| product spec | Type : Welded ALD Sensor, Adjustable ALD Sensor
Maximum temperature : Welded ALD Sensor - 450° C Adjustable ALD Sensor - 130° C Feedthrough : Welded ALD Sensor - 2.75 in. ConFlat® Adjustable ALD Sensor - 2.75 in. ConFlat® equipped with O-ring compression fittings Sensor/feedthrough connection : Welded ALD Sensor - Welded (no fillers) Adjustable ALD Sensor - O-ring compression fittings Gas and coax tubes : Welded ALD Sensor - Gas: 3.2 mm (1/8 in.) O.D. (vacuum side), 6.4 mm (1/4 in.) O.D. (atmosphere side) Coax: 4.8 mm (3/16 in.) O.D. Adjustable ALD Sensor - Gas: 3.2 mm (1/8 in.) O.D. Coax: 4.8 mm (3/16 in.) O.D. Sensor head size (maximum envelope) : Welded ALD Sensor, Adjustable ALD Sensor - 34 x 35 x 24 mm (1.35 x 1.38 x 0.94 in.) Crystal exchange : Welded ALD Sensor, Adjustable ALD Sensor - Front loading, self-contained package Cam-type locking handle Mounting : Welded ALD Sensor, Adjustable ALD Sensor - Four #4-40 tapped holes on back of sensor body Materials Body and holder : Welded ALD Sensor, Adjustable ALD Sensor - 304 stainless steel Springs : Welded ALD Sensor, Adjustable ALD Sensor - Molybdenum and Inconel X-750 Gas and coax tubes : Welded ALD Sensor, Adjustable ALD Sensor - Seamless 304 stainless steel Other mechanical parts : Welded ALD Sensor, Adjustable ALD Sensor - 18-8 or 304 stainless steel Insulators : Welded ALD Sensor, Adjustable ALD Sensor - >99% Al2O3 in vacuum >99% Al2O3 in vacuum Wire : Welded ALD Sensor, Adjustable ALD Sensor - 1) Ni (in vacuum) 2) Ni plated Cu (elsewhere) Braze : Welded ALD Sensor, Adjustable ALD Sensor - Vacuum process high temperature Ni-Cr alloy O-ring compression fittings : Welded ALD Sensor - N/A Adjustable ALD Sensor - 304 stainless steel, Viton® |
| quantity | 0 |
| reg date | 2017-01-18 17:22:33 |
| single | No |