Crystal 12® Sensor
Crystal 12® Sensor
제품 특징
- The INFICON Crystal 12 Sensor replaces its crystals automatically without interrupting your process, when partnered with the INFICON IC6 Thin Film Deposition Controller. Whenever a crystal becomes unstable or fails, IC6 signals the Crystal 12 sensor carousel to immediately rotate a new crystal into position, for continuous deposition rate monitoring. To further minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 10 |
| product spec | Type : Crystal 12 Sensor
Maximum bakeout temp with no water : 130°C Maximum operating isothermal environment temperature with minimum water flow : 300° C Size (maximum envelope) : 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed Water and air length : Standard 30 in. (762 mm) Crystal exchange : Front-loading Mounting : Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1). Weight : 4.92 lb. (2.23 kg) Installation Requirements Feedthrough : -Qty (1) 2-3/4 in. ConFlat® with one coaxial feedthrough, two pass water, one air, IPN 750-685-G1, or, -Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings or, -Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030- G1 Mounting : User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose. Air and Water Connections : User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.) Utilities : Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve. Materials Plate, Material Shield, Mechanical Parts, Body and Carousel : 304 type stainless steel Springs, Electrical Contacts : Au plated Be-Cu, Au Plated 302 stainless steel Water and air tubes : S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing Connector : Stainless steel Insulators : Teflon, Peek® Cable : Teflon insulated copper plated steel Crystal : 0.550 in. (13.97 mm) diameter 1 in. bolt and Ultra-Torr (compression fitting) terminations Materials : 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON® Temperature : Operational environment to 300° C with water cooling or 165° C without Mounting : 1.015 in. ±0.010 in. diameter aperture CF 40 welded terminations Materials : 304 stainless steel, Teflon, ceramic, beryllium nickel Temperature : Operational environment to 450° C with water cooling or 165° C without Mounting : Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min. |
| quantity | 0 |
| reg date | 2017-01-18 17:22:33 |
| single | No |