Crystal 12® Sensor 제품 이미지
Crystal 12® Sensor

Crystal 12® Sensor

제품 특징

  • The INFICON Crystal 12 Sensor replaces its crystals automatically without interrupting your process, when partnered with the INFICON IC6 Thin Film Deposition Controller. Whenever a crystal becomes unstable or fails, IC6 signals the Crystal 12 sensor carousel to immediately rotate a new crystal into position, for continuous deposition rate monitoring. To further minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open.

제품 상세 정보

항목
connector
No
managed
No
overview order
1
product order
10
product spec
Type : Crystal 12 Sensor
Maximum bakeout temp with no water : 130°C
Maximum operating isothermal environment temperature with minimum water flow : 300° C
Size (maximum envelope) : 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed
Water and air length : Standard 30 in. (762 mm)
Crystal exchange : Front-loading
Mounting : Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1).
Weight : 4.92 lb. (2.23 kg)

Installation Requirements
Feedthrough :
-Qty (1) 2-3/4 in. ConFlat® with one coaxial feedthrough, two pass water, one air, IPN               750-685-G1, or,
-Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr               compression fittings or,
-Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-              G1
Mounting : User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose.
Air and Water Connections : User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.)
Utilities : Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve.

Materials
Plate, Material Shield, Mechanical Parts, Body and Carousel : 304 type stainless steel
Springs, Electrical Contacts : Au plated Be-Cu, Au Plated 302 stainless steel
Water and air tubes : S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing
Connector : Stainless steel
Insulators : Teflon, Peek®
Cable : Teflon insulated copper plated steel
Crystal : 0.550 in. (13.97 mm) diameter

1 in. bolt and Ultra-Torr (compression fitting) terminations
Materials : 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON®
Temperature : Operational environment to 300° C with water cooling or 165° C without
Mounting : 1.015 in. ±0.010 in. diameter aperture

CF 40 welded terminations
Materials : 304 stainless steel, Teflon, ceramic, beryllium nickel
Temperature : Operational environment to 450° C with water cooling or 165° C without
Mounting : Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min.
quantity
0
reg date
2017-01-18 17:22:33
single
No
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