Sputtering Sensor
Sputtering Sensor
제품 특징
- The INFICON Sputtering Sensor is specifically designed for use in any sputtering process. The sensor body and cooling tubes are gold plated beryllium copper for maximum cooling efficiency in the sputtering environment. A magnet built into the sensor head reduces excessive heating by energetic free electrons in sputtering systems by deflecting them with the external magnetic field. The rear loading crystal holder design allows easy crystal replacement without having to remove the sensor head from the system.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 8 |
| product spec | Type : Sputtering Sensor
Maximum bakeout temp with no water : 105°C Maximum operating isothermal environment temperature with minimum water flow : 400° C Size (maximum envelope) : 1.36 in. OD x 0.69 in. high (3.45 cm x 1.75 cm) Water, air and coax length : Standard 30 in. (76.2 cm) Crystal exchange : Rear-loading Mounting : Customer supplied Installation Requirements Feedthrough : 2 pass water with coax connector, 2¾ in. ConFlat® Flange – IPN 002-043 , 1 in. Bolt – IPN 002-042 Other : 1) Customer to provide vacuum-tight braze joints or connectors for the water tubes. 2) XIU or Oscillator designed to interface with the specific deposition controller. Water flow rate : Minimum water flow 750 cc/min, 30° C max (Do not allow to freeze) Coolant should not contain chlorides as stress corrosion cracking may occur. If the water tube passes through a cryoshroud, drain the tubes if the water flow is stopped for any reason. Materials Body and holder : Au plated Be-Cu Springs, electrical contacts : Au plated Be-Cu Water tubes : Au plated Be-Cu, 0.125 in. (0.32 cm) O.D. Connector : 304 Stainless steel Insulators : 99% Al2O3 Wire : Teflon® insulated copper Solder : Cadmium free silver and indium alloys Crystal : 0.550 in. (1.4 cm) Diameter Magnet : ALNICO 5 Alloy Optional Shutter Assembly 750-005-G1 Specifications Temperature : 130° C 1 in. bolt and Ultra-Torr (compression fitting) terminations Materials : 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON® Temperature : Operational environment to 300ºC with water cooling or 165ºC without Mounting : 1.015 in. ±0.010 in. diameter aperture CF 40 welded terminations Materials : 304 stainless steel, Teflon, ceramic, beryllium nickel Temperature : Operational environment to 450ºC with water cooling or 165ºC without Mounting : Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min. |
| quantity | 0 |
| reg date | 2017-01-18 17:22:33 |
| single | No |