Front Load Dual Sensor
Front Load Dual Sensor
제품 특징
- INFICON Front Load Dual crystal sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. The dual sensor provides a backup crystal and is essential for critical processes where it is desirable to have the second crystal in the vacuum chamber.
- The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion. Assembled mechanically rather than soldered, parts can be replaced conveniently in the field, if necessary. Sensors can be ordered individually or in a sensor/feedthrough combination that can be either welded or assembled with compression fittings.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 2 |
| product spec | Type : Front Load Dual Sensor
Maximum bakeout temp with no water : 130° C Maximum operating isothermal environment temperature with minimum water flow : 400 ° C Size (maximum envelope without shutter) : 1.54 in. x 3.23 in. x 1.95 in. (39.12 mm x 82.04 mm x 49.54 mm) Water tube and coax length, “E” sensor : Standard 30 in. (762 mm) Crystal exchange : Front-loading, self-contained package for ease of exchange. Shutter flips up to ease access to the holders. Mounting : Two #4-40 tapped holes on the back of the sensor body Installation Requirements Feedthrough : Qty. (1) 2¾ in. (69.85 mm) ConFlat® with 2 Microdot®, 2 pass water and air, or Qty. (1) 1 in. (25.4 mm) bolt with 2 Microdot, 2 pass water and air. Other : 1) Valve assembly for air—IPN 750-420-G1 2) Two oscillators or one oscillator and 779-220-G1 CrystalTwo Switch designed to interface with the deposition controller. 3) For automatic operation, the deposition process controller must be designed for the implementation of this feature. Utilities : 1) Minimum water flow 150-200 cc/min, 30°C max (Do not allow to freeze.) 2) Air, 80 PSIG (5.5 bar) [552 kPa] very low volume, DO NOT EXCEED 110 PSIG (7.6 bar) [760 kPa] Water quality Coolant should not contain chlorides as stress corrosion cracking may occur. Extremely dirty water may result in loss of cooling capacity. Materials Body and holder : 304 Type stainless steel Springs : Au plated Be-Cu Water tubes : S-304, 0.125 in. (3.175 mm) OD x 0.015 in. (0.381 mm) Wall thickness seamless stainless steel tubing Connector (Microdot) : Stainless steel, Teflon® and glass insulated Insulators : >99% Al2O3 Wire : Teflon insulated copper Other mechanical parts : 304 or 18-8 stainless steel Braze : Vacuum process high temperature Ni-Cr alloy Crystal : 0.550 in. (13.97 mm) diameter Feedthrough Specifications 1 in. bolt and Ultra-Torr (compression fitting) terminations Materials : 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON® Temperature : Operational environment to 300ºC with water cooling or 165° C without Mounting : 1.015 in. ±0.010 in. diameter aperture Feedthrough Specifications CF 40 (2 3/4 in. ConFlat) welded terminations Materials : 304 stainless steel, Teflon, ceramic, beryllium nickel Temperature : Operational environment to 450° C with water cooling or 165° C without Mounting : Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min. |
| quantity | 0 |
| reg date | 2017-01-18 17:22:33 |
| single | No |