CrystalSix® Sensor
CrystalSix® Sensor
제품 특징
- The INFICON CrystalSix Sensor is critical for long processes demanding continuous rate control. Whether an OLED, MBE, solar, long optical coating, or other processes having an extended period between chamber venting, the CrystalSix sensor offers the security of 6 quartz monitor crystals in one sensor head. When used with an INFICON Thin Film Controller, the CrystalSix automatically rotates a new crystal into position whenever the current crystal fails or becomes unstable. Crystals are automatically replaced without interrupting your process for continued deposition rate monitoring.
- Crystal indexing is accomplished with a pneumatically driven mechanism. This pneumatically driven motor provides better crystal thermal stability than competitive units using expensive in-vacuum, heat generating, electric motors. One-eighth inch water cooling tubes keep the sensor head thermally stable and allow flexibility in sensor placement.
- When used with certain INFICON thin film controllers, the sensor provides position feedback so specific positions can be used with specific materials.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 9 |
| product spec | Type : CrystalSix Sensor
Maximum bakeout temp with no water : 130°C Maximum operating isothermal environment temperature with minimum water flow : 400° C Water, air and coax length : Standard 30 in. (76 cm) Crystal exchange : Front-loading, extraction tool required (supplied with unit) Mounting : Six #4-40 tapped holes on the back of the sensor body Size (maximum envelope) : 3.8 in. (9.7 cm) DIA x 2.0 in. (5.1 cm) high Installation Requirements Feedthrough : -Qty (1) 2¾ in. ConFlat® with one coaxial feedthrough, two pass water, one air IPN 750-685-G1, or, -Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings or, -Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030- G1, Other : User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with CrystalSix accessory kit.) Utilities Minimum water flow : 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply : 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa – 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve. Materials Plate, holders, material shield, mechanical parts : 304 type stainless steel Springs, electrical contacts : Au plated Be-Cu, Au Plate Inconel, 303 stainless steel Water and air tubes : S-304, 0.125 in. (0.32 cm) O.D. x 0.016 in. (0.04 cm) Wall Thickness 30 in. Long (76 cm) seamless stainless steel tubing Connector (Microdot®) : Stainless steel Insulators : >99% Al2O3 Cable : Teflon® insulated copper Crystal : 0.550 in. Diameter Body and carousel : 2024 T351 Aluminum |
| quantity | 0 |
| reg date | 2017-01-18 17:22:33 |
| single | No |