UHV Bakeable Sensor 제품 이미지
UHV Bakeable Sensor

UHV Bakeable Sensor

제품 특징

  • INFICON UHV Bakeable Crystal Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. Made from 304 Stainless Steel, Molybdenum, Inconel, Nickel, and Alumina materials, the UHV Bakeable Sensor is designed to withstand continuous bakeout temperatures up to 450° C (for bakeout only, water flow required for actual deposition monitoring). The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion.

제품 상세 정보

항목
connector
No
managed
No
overview order
1
product order
6
product spec
Type : Bakeable Sensor w/ Shutter Bakeable Sensor w/out Shutter
Maximum temperature :
Sensor w/ Shutter - 400° C continuous (for bake only; water flow recommended for actual deposition monitoring)
Sensor w/out Shutter - 450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
Sensor head size (maximum envelope) :
Sensor w/ Shutter - 1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high
Sensor w/out Shutter - 1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high)
Crystal exchange :
Sensor w/ Shutter - Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange.
Sensor w/out Shutter - Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
Mounting :
Sensor w/ Shutter - a) Standard—four #4-40 tapped holes on the back of the body b) Optional—right angle bracket; IPN 007-108
Sensor w/out Shutter - Four #4-40 tapped holes on the back of the body
Feedthrough :
Sensor w/ Shutter - 2¾ in. ConFlat®, integral with sensor head Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius)
Sensor w/out Shutter - 2¾ in. ConFlat, integral with sensor head, Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius)
Utilities :
Sensor w/ Shutter - 1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.), 2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa], 3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required
Sensor w/out Shutter - Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.)

Materials
Body and holder : Sensor w/ Shutter, Sensor w/out Shutter - 304 type stainless steel
Springs : Sensor w/ Shutter, Sensor w/out Shutter - Molybdenum and Inconel X-750
Water, air and coax lines : Sensor w/ Shutter - 0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
Other mechanical parts : Sensor w/ Shutter, Sensor w/out Shutter - 18-8 or 304 stainless
Insulators : Sensor w/ Shutter, Sensor w/out Shutter - >99% Al2O3 in vacuum; other high density ceramics used elsewhere
Wire : Sensor w/ Shutter, Sensor w/out Shutter - 1) Ni (in vacuum), 2) Ni plated Cu (elsewhere)
Braze : Sensor w/ Shutter, Sensor w/out Shutter - Vacuum process high temperature Ni-Cr alloy
Crystal : Sensor w/ Shutter, Sensor w/out Shutter - 0.550 in. (13.97 mm) diameter
quantity
0
reg date
2017-01-18 17:22:33
single
No
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