Cygnus® 2 Thin Film Deposition Controller
Cygnus® 2 Thin Film Deposition Controller
제품 특징
- Cygnus 2 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your OLED process. Cygnus 2 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of .00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of Cygnus 2, allowing you to make excellence repeatable.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 2 |
| product spec | Measurement Performance
Frequency resolution : ±0.0035 Hz @ 6 MHz Thickness and rate resolution/measurement (1) : ±0.00433 Å Measurement frequency range : 6.0 to 4.5 MHz (fixed) Thickness accuracy (2) : 0.5% Measurement interval : 0.10 s Multiple measurement averaging : 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 sec. averaging allowed Design Features Multiple sensor measurement : yes (up to 6 sensors) Auto Z : yes Co-deposition : yes (up to 6 sensors) Process Recipe & Data Management Material programs : 6 independent materials USB memory : yes Data logging : yes Hardware Features Sensors (3) Single : 6 Dual w/CrystalTwo® : 6 (with one CrystalTwo Switch per sensor input) CrystalSix® : 6 Crystal 12® : 6 Generic : 6 Source Controls Number of sources (4) : up to 6 Source control voltages : 0 to +/-10 V, adjustable Output resolution : 15 bits over full range (0 to 10V) Crucible positions : 64 Inputs / Outputs Inputs : 14 standard, up to 28 optional; TTL/CMOS logic compatible or closure to ground Outputs : 8 standard, up to 24 optional programmable SPST relays rated at 30 V(dc) or 30 V(ac) RMS or 42 V peak @ 2.5 amps; 14 optional TTL outputs Recorder output (4) : 0 to +10 V, adjustable Logic statements : 100 fully programmable; up to 5 actions, 5 events per statement Communications Standard : RS232 Optional : Ethernet Display Thickness resolution : 1 Å for 0 to 9.999 kÅ, 10 Å for 10.00 to 99.99 kÅ, 100 Å for 100.0 to 999.9 kÅ, 1 kÅ for 1000 to 9999 kÅ Rate resolution : 0.001 for 0 to 9.999 Å/s, 0.01 for 0 to 99.99 Å/s, 0.1 for 100 to 999.9 Å/s Operation Power requirements : 100 – 230 V (ac) +/- 15%, 50 / 60 Hz +/- 3 Hz Operating temperature : 0 to 50 C (32 to 122 F) Dimensions, excluding mounts (h x w x d) : 5.25” x 19” x 13” (133mm x 483mm x 330 mm) Weight : 13 lbs (5.9 kg) (1) Tooling/density = 100/1, fundamental frequency = 6 MHz (2) Varies according to process; figures reflect typical accuracy (3) Maximum configuration of each type (4) Cygnus 2 has 6 DAC outputs standard, 6 more can be added as an option. Any of the 12 can be configured as source control voltages or recorder outputs however the number of sources that can be controlled simultaneously is 6 |
| quantity | 0 |
| reg date | 2017-01-18 17:22:33 |
| single | No |