XTC/3 Thin Film Deposition Controller 제품 이미지
XTC/3 Thin Film Deposition Controller

XTC/3 Thin Film Deposition Controller

제품 특징

  • Now get everything you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation, and extremely high reliability to ensure productivity.
  • INFICON, the global leader in thin film deposition control, now offers an instrument with a remarkably low cost of ownership for unprecedented value.
  • Whether your control needs reflect production or research and development use, you will find a precise match in the INFICON XTC/3.

제품 상세 정보

항목
connector
No
managed
No
overview order
1
product order
3
product spec
Frequency Resolution : XTC3/S, XTC3/M - ±0.028 Hz @ 6 MHz
Measurement Frequency Range : XTC3/S,XTC3/M - 6.0 to 5.0 MHz (fixed)
Measurement Interval : XTC3/S,XTC3/M - 0.25 seconds
Thickness & Rate Resolution / Measurement (1) :
XTC3/S, XTC3/M - ±0.034 Å
Measurement Technology : XTC3/S, XTC3/M - ModeLock
Number of Processes : XTC3/S - 1, XTC3/M - 99
Number of Layers : XTC3/S - 1, XTC3/M - 999
Number of Material Programs (or Films) : XTC3/S - 9, XTC3/M - 32
Number of Sensor Inputs : XTC3/S, XTC3/M - 2
CrystalSix / Crystal 12 Sensor Support : XTC3/S, XTC3/M - Yes
Support XTAL 2 Switch : XTC3/S, XTC3/M - Yes
Number of Source Outputs : XTC3/S, XTC3/M - 2
Computer Communications :
XTC3/S, XTC3/M - RS232 standard, Ethernet TCP/IP optional
Max RS232 Baud Rate : XTC3/S, XTC3/M - 115.2 KBaud
Automatic Crystal Switch : XTC3/S, XTC3/M - Yes
Number of Relays :
XTC3/S - 12, Not Event Assignable,
XTC3/M - 12, Event Assignable

Number of Programmable Relay Functions : XTC3/S, XTC3/M - 1
Functions per Relay : XTC3/S, XTC3/M - 1
Relay Voltage Rating :
XTC3/S, XTC3/M - 30VDC or 30VAC RMS or 42V peak at 2.5Amps
Number of Inputs : XTC3/S, XTC3/M - 8 TTL, 24VDC Max
Number of Programmable Input Functions :
XTC3/S - 1, Not Event Assignable
XTC3/M - 1, Event Assignable
Number of Recorder Outputs : XTC3/S, XTC3/M - 1
Manual Power / Hand Held Controller : XTC3/S, XTC3/M - Yes
Exhaust Fan : XTC3/S, XTC3/M - No Exhaust Fan
Test Mode : XTC3/S, XTC3/M - Yes
Shutter Delay : XTC3/S, XTC3/M - Yes
Secondary Tooling : XTC3/S, XTC3/M - Yes
Case Dimensions : XTC3/S, XTC3/M - half rack, 2U high
Rate and Thickness Display Resolution :
XTC3/S, XTC3/M - 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A
Film Select via Inputs : XTC3/S - Yes, XTC3/M - No
User Guide Languages : XTC3/S, XTC3/M - English, Chinese

Control Loops : XTC3/S, XTC3/M - PID
Software to Operate from PC : XTC3/S, XTC3/M - Yes
Datalogging : XTC3/S, XTC3/M - Yes
Quality and Stability Function : XTC3/S, XTC3/M - Yes
Sample and Hold (RateWatcher™) : XTC3/S, XTC3/M - Yes
Crucible Selection : XTC3/S, XTC3/M - Yes
Crucible Feedback Input : XTC3/S, XTC3/M - Yes
Select Control Voltage Polarity :
XTC3/S, XTC3/M - Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution
Program Lock Code : XTC3/S, XTC3/M - Yes
Display with Graphics : XTC3/S, XTC3/M - Yes
User Labeled Processes (cell phone style alphanumeric entry) : XTC3/S, XTC3/M - No
User Labeled Films (cell phone style alphanumeric entry) : XTC3/S, XTC3/M - No
Transfer Sensor Control : XTC3/S, XTC3/M - Yes
XTC/2 RS232 Communications Compatibility :
XTC3/S, XTC3/M - Yes (limited)

(1) Tooling/density = 100/1, fundamental frequency = 6 MHz
quantity
0
reg date
2017-01-18 17:22:33
single
No
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