XTC/3 Thin Film Deposition Controller
XTC/3 Thin Film Deposition Controller
제품 특징
- Now get everything you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation, and extremely high reliability to ensure productivity.
- INFICON, the global leader in thin film deposition control, now offers an instrument with a remarkably low cost of ownership for unprecedented value.
- Whether your control needs reflect production or research and development use, you will find a precise match in the INFICON XTC/3.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 3 |
| product spec | Frequency Resolution : XTC3/S, XTC3/M - ±0.028 Hz @ 6 MHz
Measurement Frequency Range : XTC3/S,XTC3/M - 6.0 to 5.0 MHz (fixed) Measurement Interval : XTC3/S,XTC3/M - 0.25 seconds Thickness & Rate Resolution / Measurement (1) : XTC3/S, XTC3/M - ±0.034 Å Measurement Technology : XTC3/S, XTC3/M - ModeLock Number of Processes : XTC3/S - 1, XTC3/M - 99 Number of Layers : XTC3/S - 1, XTC3/M - 999 Number of Material Programs (or Films) : XTC3/S - 9, XTC3/M - 32 Number of Sensor Inputs : XTC3/S, XTC3/M - 2 CrystalSix / Crystal 12 Sensor Support : XTC3/S, XTC3/M - Yes Support XTAL 2 Switch : XTC3/S, XTC3/M - Yes Number of Source Outputs : XTC3/S, XTC3/M - 2 Computer Communications : XTC3/S, XTC3/M - RS232 standard, Ethernet TCP/IP optional Max RS232 Baud Rate : XTC3/S, XTC3/M - 115.2 KBaud Automatic Crystal Switch : XTC3/S, XTC3/M - Yes Number of Relays : XTC3/S - 12, Not Event Assignable, XTC3/M - 12, Event Assignable Number of Programmable Relay Functions : XTC3/S, XTC3/M - 1 Functions per Relay : XTC3/S, XTC3/M - 1 Relay Voltage Rating : XTC3/S, XTC3/M - 30VDC or 30VAC RMS or 42V peak at 2.5Amps Number of Inputs : XTC3/S, XTC3/M - 8 TTL, 24VDC Max Number of Programmable Input Functions : XTC3/S - 1, Not Event Assignable XTC3/M - 1, Event Assignable Number of Recorder Outputs : XTC3/S, XTC3/M - 1 Manual Power / Hand Held Controller : XTC3/S, XTC3/M - Yes Exhaust Fan : XTC3/S, XTC3/M - No Exhaust Fan Test Mode : XTC3/S, XTC3/M - Yes Shutter Delay : XTC3/S, XTC3/M - Yes Secondary Tooling : XTC3/S, XTC3/M - Yes Case Dimensions : XTC3/S, XTC3/M - half rack, 2U high Rate and Thickness Display Resolution : XTC3/S, XTC3/M - 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A Film Select via Inputs : XTC3/S - Yes, XTC3/M - No User Guide Languages : XTC3/S, XTC3/M - English, Chinese Control Loops : XTC3/S, XTC3/M - PID Software to Operate from PC : XTC3/S, XTC3/M - Yes Datalogging : XTC3/S, XTC3/M - Yes Quality and Stability Function : XTC3/S, XTC3/M - Yes Sample and Hold (RateWatcher™) : XTC3/S, XTC3/M - Yes Crucible Selection : XTC3/S, XTC3/M - Yes Crucible Feedback Input : XTC3/S, XTC3/M - Yes Select Control Voltage Polarity : XTC3/S, XTC3/M - Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution Program Lock Code : XTC3/S, XTC3/M - Yes Display with Graphics : XTC3/S, XTC3/M - Yes User Labeled Processes (cell phone style alphanumeric entry) : XTC3/S, XTC3/M - No User Labeled Films (cell phone style alphanumeric entry) : XTC3/S, XTC3/M - No Transfer Sensor Control : XTC3/S, XTC3/M - Yes XTC/2 RS232 Communications Compatibility : XTC3/S, XTC3/M - Yes (limited) (1) Tooling/density = 100/1, fundamental frequency = 6 MHz |
| quantity | 0 |
| reg date | 2017-01-18 17:22:33 |
| single | No |