SQC-310 Thin Film Deposition Controller 제품 이미지
SQC-310 Thin Film Deposition Controller

SQC-310 Thin Film Deposition Controller

제품 특징

  • With advanced electronics, an improved display, and a very affordable price, the INFICON SQC-310 Series gives you features not found on competitors' thin film controllers. And you can choose the ideal model for your application: sequential deposition (SQC-310) or codeposition (SQC-310C).

제품 상세 정보

항목
connector
No
managed
No
overview order
1
product order
4
product spec
Measurement
QCM Inputs : SQC-310 : 2 (4 optional) SQC-310C : 4
Measurement Frequency Range :
SQC-310, SQC-310C - Adjustable: 1.0 MHz minimum 6.5 MHz maximum
Frequency Resolution (1) : SQC-310, SQC-310C - ± 0.012 Hz
Thickness and rate resolution/measurement (2) : SQC310, SQC-310C - ±0.015 Å
Frequency Stability : SQC-310, SQC-310C - ± 2 ppm total, 0 to 50C
Measurement Interval : SQC-310, SQC-310C - 0.10 to 1.0 s (adjustable)
Rate Display : SQC-310, SQC-310C - 0.01 Å/sec


Control
Storage : SQC-310, SQC-310C - 100 processes, 1000 layers, 50 films
Control Outputs : SQC-310 : 2 (4 optional) SQC-310C : 4
Output Signal : SQC-310, SQC-310C - ± 0 to 10 VDC, 15 bits
Digital Inputs/Relays : SQC-310 : 8/8 (16/16 optional), SQC-310C : 16/16
Digital Inputs : SQC-310, SQC-310C - 5 VDC non-isolated
Relays : SQC-310, SQC-310C - SPST Form 1A, 30V, 2A max
Interface(s) : SQC-310, SQC-310C - Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power Control : SQC-310, SQC-310C - Optional (IPN 782-900-017)


Display
Type : SQC-310, SQC-310C - 1/4 VGA 320 x 240 active matrix color LCD
Graphs : SQC-310, SQC-310C - Rate, deviation, power or full screen numeric

General
Power : SQC-310, SQC-310C - 100-240 VAC, 50/60 Hz, 25W
Compliance : SQC-310, SQC-310C - CE, RoHS
Windows® Software : SQC-310, SQC-310C - Included
Housing / Mounting : SQC-310, SQC-310C - 5 1/4” half-rack

(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval
quantity
0
reg date
2017-01-18 17:22:33
single
No
문의하기