SQM-160 Thin Film Deposition Monitor
SQM-160 Thin Film Deposition Monitor
제품 특징
- The SQM-160 uses proven INFICON quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. Two sensor inputs are standard and four additional sensor inputs are optional. Two recorder outputs provide analog rate and thickness signals.
- Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor. The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.1Å/s or 0.01Å/s are user selectable. In addition, Frequency or Mass displays can be selected. Four relay outputs allow the SQM-160 to control source or sensor shutters, signal time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop and zero readings.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 2 |
| product spec | Type : SQM-160 Standard Resolution, SQM-160 High Resolution
QCM Sensor Inputs : SQM-160 Standared, SQM-160 High - Standard: 2; optional: 4 Measurement Frequency Range : SQM-160 Standared, SQM-160 High - Adjustable: 1.0 MHz minimum, 6.5 MHz maximum Frequency Resolution (1) : SQC-160 Standard - ± 0.30 Hz SQC-160 Standard - ± 0.03 Hz Thickness and rate resolution/measurement (2) : SQC-160 Standard - ± 0.37 Å SQC-160 High - ± 0.037 Å Measurement Interval : SQM-160 Standared, SQM-160 High - 0.10 to 2.0 s (adjustable) Measurement Filter : SQM-160 Standared, SQM-160 High - 1 to 20 readings Stored Films : SQM-160 Standared, SQM-160 High - 99 Analog Outputs : SQM-160 Standared, SQM-160 High - Two 0 to 5 VDC, rate & thickness Digital Inputs/Outputs : SQM-160 Standared, SQM-160 High - Two inputs, four relay outputs Communications Interface : SQM-160 Standared, SQM-160 High - Standard: RS-232;, Optional: USB or Ethernet Power : SQM-160 Standared, SQM-160 High - 100-120/200-240 VAC, 50/60 Hz, 20 W CE Compliance : SQM-160 Standared, SQM-160 High - Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD Housing/Mounting : SQM-160 Standared, SQM-160 High - 1/2-rack cabinet, 3-1/2" high, 89 x 213 x 197mm (3-1/2" x 8-1/2" x 7-3/4") Weight : SQM-160 Standared, SQM-160 High - 2.7 Kg (6 lbs) Windows Software (included) : SQM-160 Standared, SQM-160 High - Provides remote setup and operation, datalogging functions - see sample screenshot at right. (1) Resolution given for 0.10 s measurement interval (2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.10 s measurement interval |
| quantity | 0 |
| reg date | 2017-01-18 17:22:33 |
| single | No |