FC280 / FC380 Series
FC280 / FC380 Series Mass Flow Controller
제품 특징
- Process Values
- Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC280SA and FM380SA models are premium quality elastomer-sealed mass flow controllers and meters. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | Yes |
| overview mng | ● Full Scale (N2 equivalent) : 10 sccm – 30 slpm ● Shutdown : 2% full scale ● Step Response Time : 1 sec ● Accuracy : ± 1.0% full scale ● Elastomers Available : Viton®, Kalrez®, Neoprene |
| overview order | 12 |
| product order | 1 |
| product spec | Performance
● Full Scale (N2 equivalent) : 10 sccm – 30 slpm ● Shutdown : 2% full scale ● Step Response Time : 1 sec (dependent on step request and conditions) ● Accuracy : ± 1.0% full scale ● Linearity : ± 0.5% full scale ● Repeatability : ± 0.2% full scale ● Pressure Coefficient : 0.00001% per bar, 0.007% per psi (typical) ● Temperature Coefficient : 0.1% per °C full scale (zero and span) ● Attitude Sensitivity : < 0.25% @ 90° C Mechanical ● Valve : normally-closed solenoid ● Materials : 316L stainless steel, 446 stainless steel, PFA Teflon® ● Elastomers Available : Viton®, Kalrez®, Neoprene ● Leak Integrity : 1 x 10-9 atm-cc per sec (He) inboard <2% full scale with Teflon poppet (normally-closed) <5% full scale with Teflon poppet (normally-open) ● Weight : 0.98 Kg (2 lb) Electrical ● Supply Voltage : ± 12 VDC to ± 18 VDC ● Supply Current : 150 mA nominal ● Power Consumption : 3.3 watts @ ± 15 volts ● Input/Output Signal : 0-5 VDC Environmental ● Operating Temperature : 5 – 50° C (ambient and gas) ● Humidity : 0 – 95% RH, non-condensing ● Maximum Inlet Pressure : 11.5 bar (150 psig) ● Differential Pressure : Nominal, 0.7 – 2.8 bar (10-40 psid) Note: In accordance with SEMI Standard E12-91, Standard Temperature is 0° C and Standard Pressure is 760 mm Hg (14.7 psia). |
| quantity | 0 |
| reg date | 2017-01-18 17:22:46 |
| single | No |