Tylan FC-2920/FM-3920 Series
Tylan FC-2920/FM-3920 Series
제품 특징
- Process Values
- The Tylan FC2920 mass flow controllers and the Tylan FM3920 flowmeters accurately and reliably measure and control the mass flow rate of gases up to 200 slm (420 scfh) of nitrogen equivalents. The Tylan FC2921 offers a 15-pin D connector with optional 4-20 mA DC signals. The Tylan FM3920 and FM3921 flowmeters have the same specifications and dimensions as the Tylan FC2920 and Tylan FC2921 MFCs respectively. The Tylan FC2920 MFCs consist of a thermal gas flow sensor, adjustable bypass flow splitter, adjustable solenoid control valve and electronics.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 3 |
| product spec | Performance
● Full Scale (N2 equivalent) : 30 slpm – 200 slpm ● Turndown Ratio - 25:1 ● Step Response Time : 30-100 slpm, 3 sec 100-200 slpm, 6 sec ● Accuracy : ± 2.0% full scale ● Linearity : ± 0.5% full scale ● Repeatability : ± 0.2% full scale ● Pressure Coefficient : 0.00001% per bar, 0.007% per psi (typical) ● Temperature Coefficient : 0.05% per °C (zero and span) ● Attitude Sensitivity : < 0.25% @ 90° C without autozero Mechanical ● Valve : normally-closed solenoid ● Materials : 316L stainless steel, 420 ss, PFA Teflon® ● Elastomers Available : Viton®, Kalrez®, Neoprene ● Leak Integrity : 5 x 10-9 atm-cc per sec (He) inboard <4% full scale with Teflon poppet (normally-closed) ● Weight : 1.1 Kg (2.5 lb) Electrical ● Supply Voltage : ± 12 VDC to ± 18 VDC ● Supply Current : 170 mA nominal (200mA max @±18VDC) ● Power Consumption : 3.5 watts @ ± 15 volts ● Input/Output Signal : 0-5 VDC ● Option(15pin D sub) : 4-20mA DC ● Supply Current : 170 mA nominal (200mA max @±18VDC) Environmental ● Operating Temperature : 5 – 50° C (ambient and gas) ● Humidity : 0 – 95% RH, non-condensing ● Maximum Inlet Pressure : 11.5 bar (150 psig) ● Differential Pressure : 30-99 slpm 20-50 psid 100-150 slpm 30-60 psid 151-200 slpm 40-60 psid Note: In accordance with SEMI Standard E12-91, Standard Temperature is 0° C and Standard Pressure is 760 mm Hg (14.7 psia). |
| quantity | 0 |
| reg date | 2017-01-18 17:22:47 |
| single | No |