Tylan FC-2925/FM-3925 Series
Tylan FC-2925/FM-3925 Series
제품 특징
- Process Values
- The Tylan FC2925 mass flow controllers accurately and reliably measure and control the mass flow rate of gases up to 1000 slm (2100 scfh) of nitrogen equivalents. The Tylan FM3925 mass flowmeters operate over the same flow range and at pressures up to 500 psig. The Tylan FC2925 MFC and Tylan FM3925 flowmeter are equipped with a card edge connector. The Tylan FC2926 MFC and Tylan FM3926 flowmeter are available with a 15 pin subminiature D connector and optional 4 - 20 mA DC input and output signals, 0 - 5 VDC is standard. The Tylan FC2925 mass flow controller consists of a thermal gas flow sensor, bypass flow splitter, pilot-operated control valve and electronics.
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 4 |
| product spec | Performance
● Full Scale (N2 equivalent) : 300 slpm – 1000 slpm ● Turndown Ratio - 20:1 ● Step Response Time : 5 sec (dependent an step response and conditions) ● Accuracy : ± 2.0% full scale (up to 300 slm) ± 3.0% full scale (up to 1000 slm) ● Linearity : ± 1% full scale ● Repeatability : ± 0.5% full scale ● Pressure Coefficient : 0.00001% per bar, 0.007% per psi (typical) ● Temperature Coefficient : 0.01% per °C (zero and span) ● Attitude Sensitivity : < 0.25% @ 90° C without autozero Mechanical ● Valve : Normally-closed Operated Bellows Valve ● Materials : 316L stainless steel, AM350SS, 446SS ● Leak Integrity : 1 x 10-9 atm-cc per sec (He) inboard <4% full scale with Teflon poppet (normally-closed) ● Weight : 2.5 Kg (5.5 lb) Electrical ● Supply Voltage : ± 12 VDC to ± 18 VDC ● Supply Current : 110 mA nominal (125mA max @±18VDC) / FC-2925/26 ● Power Consumption : 3.3 watts @ ± 15 volts ● Input/Output Signal - 0-5 VDC ● Option(15pin D sub) - 4-20mA DC ● Supply Current : 35 mA (40 mA max @ ± 18 VDC) / FM-3925/26 Environmental ● Operating Temperature : 5 – 50° C (ambient and gas) ● Humidity : 0 – 95% RH, non-condensing ● Maximum Inlet Pressure : 11.5 bar (150 psig) ● Differential Pressure : 200-300 slpm 30-60 psid 301-1000 slpm 40-80 psid Note: In accordance with SEMI Standard E12-91, Standard Temperature is 0° C and Standard Pressure is 760 mm Hg (14.7 psia). |
| quantity | 0 |
| reg date | 2017-01-18 17:22:47 |
| single | No |