Tylan FC-4900 Series Vapor Controllers
Tylan FC-4900 Series Vapor Controllers
제품 특징
- Process Values
- Celerity`s FC4900 vapor controllers are designed specifically to meet the exacting requirements of today`s semiconductor and industrial processes. The FC4900 vapor controller enables the delivery of organometallics such as tetraethoxsilane(TEOS), trimethylphosphate(TMP) and trimethylborate(TMB) with pressure drops as low as 6.75 kPa (50Torr).
제품 상세 정보
| 항목 | 값 |
|---|---|
| connector | No |
| managed | No |
| overview order | 1 |
| product order | 5 |
| product spec | Performance
● Full Scale (N2 equivalent) : 10 sccm – 35 slpm ● Turndown Ratio - 20:1 ● Step Response Time : <1.5 sec (dependent an step response and conditions) ● Accuracy : ± 1.0% full scale ● Linearity : ± 0.5% full scale ● Repeatability : ± 0.2% full scale ● Pressure Coefficient : Upstream Pressure .67-.133 bar (50-100Torr) .133-.267 bar (100-200Torr) .267-1.07 bar (200-800Torr) % per bar (Torr) .0112 per bar (±0.150% per Torr) .0015 per bar (±0.020% per Torr) .0003 per bar (±0.004% per Torr) ● Temperature Coefficient : 0.05% per °C (zero and span) Mechanical ● Valve : Normally-open or Normally-closed solenoid ● Materials : 316L stainless steel, 416 stainless steel, Teflon® fluoropolymer, Viton® fluoroelastomer ● Leak Integrity : Elastomer Seals: 5 x 10-9 atm-cc per sec (He) inboard Metal Seals: 1 x 10-10 atm-cc per sec (He) inboard ● Weight : Without remote electronics, 0.9 Kg (2 lbs.) With remote electronics, 1.7 Kg (2 lbs.) Electrical ● Supply Voltage : ± 15 VDC nomial ±20% ● Supply Current : 110 mA nominal (125mA max @±18VDC) ● Input Impedance - 500K ohms (minimum) ● Minimum Load Impedance : 2000ohms ● Power Consumption : 3.5 watts @ ± 15 volts ● Input/Output Signal : 0-5 VDC ● Option(15pin D sub) : 4-20mA DC / VC4901 ● Supply Current : 130 mA nominal (145 mA max @ ± 18 VDC) ● Input Impedance : 250 ohms ● Maximum Load Impedance : 250ohms Environmental ● Operating Temperature : 5 – 50° C (ambient and gas) 0-100° C with remote electronics ● Humidity : 0 – 95% RH, non-condensing ● Maximum Inlet Pressure : 11.5 bar (150 psig) Note: In accordance with SEMI Standard E12-91, Standard Temperature is 0° C and Standard Pressure is 760 mm Hg (14.7 psia). |
| quantity | 0 |
| reg date | 2017-01-18 17:22:47 |
| single | No |